微流量真空气体质量流量控制器MFC330

介质要求Applicable Media洁净干燥气体Clean, dry gases

气体种类Gas Type90+Available for 90+types of gas

量程Full cale (N2 equivalent)0-2, 20, 50, 100, 200 sccm; 0- 20, 30, 50, 100, 200 slpm( MFM350 400slmp)

测量范围Measurement range0.5% F.S. (1:200)

控制范围Control range1% - 100% F.S.(1:100) （MFC）

准确度Accuracy±0.35% F.S. (<35% FS.)，±1.0% S.P. （≥35% F.S.）或 0.5%F.S.取重复精度Repeatability±0.2% F.S.

线性度Linearity±0.2% F.S.控制响应时间Typical control response time<1

秒预热时间Warm-up time5 min (T95),30分钟最佳 30min for optimum accuracy

阀门Valve function常闭式 Normally Closed

泄漏率Leak integrity1*10-10Pa*m³/sec He

分辨率Resolution ratio0.001sccm

耐压Maximum Pressure3 MPa (30bar)（50slpm以上详询厂家）

工作压差范围Operating differential pressure0~1 MPa

工作温度范围Operating temperature range-20～65℃ (环境和气体 ambient and gas)

湿度范围Relative humidity range0~98%

无凝露No - condensing

气路接头类型Process connections卡套、快拧、VCR(Compression fitting, Push-in fitting, , VCR optional)

气体接触材质MaterialFKM、316 不锈钢 (FKM 316 Stainless steel)密封材质SealsFKM，FFKM防护等级Ingress protection (housing)IP40

安装方式Mounting水平安装方向校准 Calibrated in horizontal mounting orientation固定孔Mounting holesM4↧5mm重量Weight0.84 kg (MFM) / 0.98 kg (MFC)