气体流量计 MFC350-C 热式质量流量计 精度高 响应速度快

350-C系列气体质量流量计技术参数2 sccm – 50 slm

注：所有设计及规格仅供参考，如有更改恕不另行通知。主要参数SENSOR AND CONTROL PERFORMANCE

介质要求Applicable Media洁净干燥气体Clean, dry gases

气体种类Gas Type90+Available for 90+types of gas

量程Full cale (N2 equivalent)0-2, 10, 20, 50, 100, 200 sccm; 0-1, 2, 5, 10, 20, 30, 50 slpm

测量范围Measurement range0.5% F.S. (1:200)

控制范围Control range1% - 100% F.S.(1:100) （MFC）

准确度Accuracy±0.5% F.S.

重复精度Repeatability±0.2% F.S.

线性度Linearity±0.2% F.S.

控制响应时间Typical control response time≤1 秒

预热时间Warm-up time5 min (T95),30分钟最佳 30min for optimum accuracy

阀门Valve function常闭式 Normally Closed

泄漏率Leak integrity1*10-10Pa*m³/sec He

分辨率Resolution ratio0.001sccm