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mfc330系列
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价格:¥电议
更新日期:2026/9/18 17:17:19
生 产 地:中国大陆
产品型号:mfc330
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详细内容
| 主要参数 SENSOR AND CONTROL PERFORMANCE | |
| 介质要求 Applicable media | 洁净干燥气体 Clean, dry gases |
| 气体种类 Gas type | 98+气体可选 Available for 98+ types of gas |
| 量程 Full Scale(N2 equivalent) | 0-2, 10, 20, 50, 100, 300, 500 sccm;0-1, 2, 5, 10, 20, 30 slpm |
| 测量范围measurement range | 0.5%F.S. (1:200) |
| 控制范围 Control range | 1% - 100% F.S. (1:100) |
| 准确度 Accuracy | 标准 Standard:±1% F.S. 高精度High Performance:±0.5% |
| 重复精度Repeatability | ±0.2% F.S. |
| 线性度Linearity | ±0.2% F.S. |
| 控制响应时间 Settling time (in control) | <3 |
| 预热时间 Warm-up time | 5 min (T95), 30分钟佳 30min for optimum accuracy |
| 阀门Valve function | 常闭式 Normally Closed |
| 泄露率 Leak integrity | 1*10-8 Pa·m3/sec He |
| 机械特性 MECHANICAL | |
| 大工作压力 Maximum pressure | 3 MPa (30bar) |
| 工作压差范围 Operating differential pressure | 0 ~ 1 MPa |
| 工作温度范围Operating temperature range | -20 ~ 65℃ (环境和气体 ambient and gas) |
| 湿度范围 Relative humidity range | 0 ~ 98% 无凝露 No-condensing |
| 气路接头类型Process connections | 卡套,、VCR、快插、快拧 (可选) (Push-in fitting, Push-on fitting, Compression fitting, VCR optional) |
| 气体接触材质Material | 氟橡胶、304/316不锈钢 (FKM, 300-series Stainless steel) |
| 密封材质Seals | 氟橡胶 FKM |
| 防护等 Ingress protection (housing) | IP40 |
| 安装方式 Mounting | 水平安装方向校准 Calibrated in horizontal mounting orientation |
| 固定孔 Mounting holes | M4 5mm |
| 重量 Weight | 0.96 kg |
| 电气和通讯 COMMUNICATIONS | |
| 电气连接接口类型Electrical connection | DB – 9公头 (Male) |
| 模拟信号 Analog input and output options | 0 – 5 VDC, 4 – 20 mA (可定制) |
| 输入输出阻抗 Impedance resistance | 输入阻抗>10MΩ,输出阻抗<1KΩ |
| 模拟数据更新频率Analog data update rate | 200Hz |
| 数字信号 Digital input and output options | Modbu RTU (RS232, RS485), CAN |
| 通信速率 Digital data update rate | 9600(默认), 14400, 19200, 38400, 56000, 57600, 115200 bps(用户可修改) |
| 电源 Power requirements | 15 – 40 VDC, <200mA |
| 显示更新频率Display update rate | 50Hz |
| 模拟信号精度 Analog signal accuracy | ±0.05%F.S. |
| 特征 FRATURE | |
| 标况 STP reference conditions | 20℃, 1 atm |
| 气体选择Gas Select | 可选,具体参考说明书气体系数 |
| 软件Software | Aitoly分阶流量软件 |
| 尺寸 DIMENSIONS | Weight | ||||||||
| Full scale flow | Height | Width | Depth | A | B | C | D | E | 重 量 |
| 2 sccm~30 slpm | 125.00 mm | 76.00 mm | 32.00 mm | 64.00 mm | 17.80 mm | 7.00 mm | 6.00 mm | M4 5mm | ≈0.96 kg |
| 4.921 in | 2.992 in | 1.260 in | 2.520 in | 0.701 in | 0.276 in | 0.236 in | M4 0.197 in | ≈2.1 lb | |
| 100slpm-500slpm | 138mm | 82mm | 38mm | 62.mm | 30mm | 4mm | 10mm | M4 8mm | 1.3kg |
| 5.43in | 3.22 | 1.496 | 2.220 | 1.181 | 0.157 | 0.393 | M4 0.31in | 2.88lb | |


