
高分辨率测厚仪MTM-20,MTM-20高分辨率测厚仪,ted pella高分辨率测厚仪93006-220
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更新时间:2026/10/14 9:22:46关注度:1349
关键词标签:高分辨率测厚仪MTM-20,MTM-20高分辨率测厚仪,ted,pella高分辨率测厚仪93006-220
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高分辨率厚度监测器和厚度控制器基于石英晶体的振荡频率随质量而变化的原理沉积膜在其上表面。以电子方式测量这种效果允许用于确定沉积膜的厚度。一旦密度蒸发的材料进入系统,将厚度测量到一定分辨率在范围为 0-0.1 纳米的四位 LED 显示屏上为 099.9nm。晶体和支架安装在真空室中,并通过提供的连接到 FTM 电源真空馈通。
MTM-20 高分辨率测厚仪专为 Cressington溅射镀膜机系统设计,与 108Auto、108Auto/SE 和 208HR 溅射镀膜机完全兼容系统。
MTM-10 High Resolution Thickness Monitor and | |
| General Specifications: | Microprocessor based, 4-digit display, push-button zero 6MHz crystal with lifetime check 5 times per second update rate |
| Thickness Range: | 0.0 - 999.9nm (pos/neg) |
| Resolution: | 0.1nm for gold or carbon |
| Density Range: | 0.50 - 30.00g/cm³ |
| Tooling Factor Range: | 0.25 - 8.0 |
| Vacuum Feedthrough: | CS-108; Diameter 10mm up to a plate/flange thickness of 9mm. |
| Crystal Holder: | Stainless Steel ø19 x 20mm. M4 threaded hole for mounting, 1/2" size crystals |
| Crystal Holder Cable: | Mini-SMB, female/female between crystal holder and CS-108 vacuum feedthrough |
| Processor Function: | Four sets of values can be stored in memory under Density and four under Tooling for both the MTM-10 and MTM20 |
| MTM-20 Controller: | MTM-20 only: Programmable thickness termination function with termination interface cable on 108 auto, 208HR and DC-100 Termination facility range 0-999.9nm |
| MTM-10/20 Box Size, WxDxH | 210 x 160 x 77mm (8.27" x 6.3" x 3.03") |
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