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英福康SKY电容膜片真空计
点击次数：574发布时间：2019/12/21
更新日期：2021/9/16 17:48:20
生 产 地：中国大陆
产品型号：INFICON CDG100D
详细内容
SKY电容膜片真空计INFICON CDG100D ：
SKY® CDG100D 0.1 ... 1000 托/毫巴
INFICON SKY CDG100D 压力计是实现精确总压测量与控制的理想之选。 CDG100D 真空计温度控制在 100 °C，具有卓越的性能，适用于苛刻的半导体和等离子过程。 在 100 毫托至 1000 托满刻度范围内均可使用，带有所有常用类型的法兰和现场总线接口，能够提供 0 至 10V、不受气体类型限制的线性压力信号。 INFICON 电容式压力计采用超纯氧化铝陶瓷隔膜，具有防腐蚀性。 陶瓷传感器具有信号稳定性更佳、从大气恢复的速度更快、预热时间短和使用寿命长等诸多优势。 INFICON CDG 品质卓越，极具成本效益，适用于苛刻的半导体、等离子和真空应用。
益处
- 拥有成本更低，预热速度快 50%，节能，低功耗
- 易于集成，各种满刻度、法兰和接口，标配两个设定点
- 轻松一键调零或远程信号调零指令，可调零点偏移
- 诊断端口用于快速维修和维护
- 两年保修服务，的加热概念和真空计保护延长了使用寿命
- 卓越的信号稳定性和可重复性，即使是*苛刻的等离子应用，都无需长期执行重新校准
- 合规性与标准： CE、EN、UL、SEMI、RoHS
- 用于刻蚀、CVD、PVD 和其他半导体制造过程
- 化学和腐蚀性高温过程
- 需要真空计保护的一般薄膜和真空过程
| 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar | ||
| 精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
| 温度效应 | ||||
| 零点 | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
| 满量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
| 压力， | kPa (absolute) | 400 | 260 | 130 |
| 分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
| 读数 | percent FS | 0.01 | 0.01 | 0.01 |
| 建议的读数 | percent FS | 0.05 | 0.05 | 0.05 |
| 建议的控制压力 | percent FS | 0.5 | 0.5 | 0.5 |
| 温度 | ||||
| 运行（周围环境）（5） | °C | +10 … +50 | ||
| 在法兰处烘烤 | °C | ≤110 | ≤110 | ≤110 |
| 贮存 | °C | –20 … +65 | –40 … +65 | –40 … +65 |
| 电源电压 | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| 功耗 | ||||
| 加热时 | W | ≤20 | ≤15 | ≤15 |
| 运行温度 | W | ≤14 | ≤10 | ≤10 |
| 输出信号（模拟） | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| 反应时间 (2) | ms | 30 | 30 | 130 / 30 (3) |
| 保护等级 | IP 40 | IP 40 | IP 40 | |
| 标准 | ||||
| CE 合规 | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
| ETL 认证 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| SEMI 合规 (5) | SEMI S2 | |||
| 电气连接 | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| 设定点 | ||||
| 设定点数量 | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| 继电器触点 | V (dc) A (dc) | ≤30 | ≤30 | ≤30 |
| 滞后 | percent FS | 1 | 1 | 1 |
| 诊断端口 | ||||
| 协议 | RS232-C | RS232-C | RS232-C | |
| 读数 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 设置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| 内部容积 | ||||
| 内部容积 1/2＇＇ 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 内部容积 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 内部容积 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 内部容积 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 重量 | ||||
| 重量 1/2＇＇ 管 | g | 837 | 837 | 837 |
| 重量 DN 16 ISO KF | g | 852 | 852 | 852 |
| 重量 DN 16 CF-R | g | 875 | 875 | 875 |
| 重量 8 VCR® | g | 897 | 897 | 897 |
| EtherCAT | ||||
| 协议 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| 通讯标准 | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | |
| 节点地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| 物理层 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| 数字功能读取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 数字功能设置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 过程数据 | Fixed PDO mapping ａnd configurable PDO mapping | Fixed PDO mapping ａnd configurable PDO mapping | Fixed PDO mapping ａnd configurable PDO mapping | |
| (CoE) | SDO requests, responses ａnd information | SDO requests, responses ａnd information | SDO requests, responses ａnd information | |
| EtherCAT 连接器 | RJ45, 8-pin (socket), IN ａnd OUT | RJ45, 8-pin (socket), IN ａnd OUT | RJ45, 8-pin (socket), IN ａnd OUT | |
| 电缆 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| 电缆长度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| DeviceNet™ | ||||
| 协议 | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | |
| 数据率 | kBaud | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable |
| 电缆长度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| 电缆长度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| 电缆长度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | |
| 数字功能读取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 数字功能设置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 技术规格 | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | |
| 设备类型 | ＇＇VG＇＇ vacuum gauge | ＇＇VG＇＇ vacuum gauge | ＇＇VG＇＇ vacuum gauge | |
| I / O 从属传讯 | polling only | polling only | polling only | |
| 真空计 D 型连接器的电源电压 | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | |
| 为微型连接器上的 DeviceNet 收发器提供电压 | 24 V nom / <2 W (11 … 25 V) | 24 V nom / <2 W (11 … 25 V) | 24 V nom / <2 W (11 … 25 V) | |
| DeviceNet™ 连接器 | microstyle, 5 pin, male | microstyle, 5 pin, male | microstyle, 5 pin, male | |
| CDG（模拟输出、CDG 电源电压、设定点）连接器 | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
| Profibus DP | ||||
| 波特率 | kBaud Mbaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| 地址 | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | |
| 数字功能读取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 数字功能设置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Profibus DP 连接器 | D-sub, 9 pin, female | D-sub, 9 pin, female | D-sub, 9 pin, female | |
| CDG（模拟输出、电源电压、设定点）连接器 | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
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